Method of fast surface particle and scratch detection for EUV mask backside

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12140857
APP PUB NO 20230367192A1
SERIAL NO

18225404

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Abstract

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A method of scanning a substrate and determining scratches of the substrate includes transmitting a converging beam of light that comprises multiple wavelengths to the substrate. Each wavelength of the multiple wavelengths focuses at a different distance in a focus interval around and including a surface of the substrate. The method also includes receiving reflected light from the surface of the substrate and determining a height or depth of the surface of the substrate based on a wavelength of the reflected light a highest intensity.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chih-Cheng Hsinchu, TW 101 354
Hsu, Ting-Hao Hsinchu, TW 31 216
Ku, ShinAn Hsinchu, TW 6 0
Lee, Hsin-Chang Hsinchu, TW 203 1090

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