Piezoelectric substrate, piezoelectric element and liquid ejection head
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United States of America
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Nov 12, 2024
Grant Date -
Jun 29, 2023
app pub date -
Dec 21, 2022
filing date -
Dec 21, 2022
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Abstract
A piezoelectric substrate includes: a substrate; a first electrode formed on the substrate; and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium. A full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.
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