Imprint apparatus, imprint method, method of manufacturing article, determination method, and non-transitory computer-readable storage medium
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United States of America
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Nov 12, 2024
Grant Date -
Oct 13, 2022
app pub date -
Mar 31, 2022
filing date -
Mar 31, 2022
priority date (Note) -
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Abstract
The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet arrays, a second droplet group including a plurality of second droplet arrays, and a third droplet array.
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