Acoustic wave resonator with patterned conductive layer for transverse mode suppression
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United States of America
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Nov 5, 2024
Grant Date -
Dec 10, 2020
app pub date -
Jun 4, 2020
filing date -
Jun 4, 2020
priority date (Note) -
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Abstract
Aspects of this disclosure relate to an acoustic wave resonator with a patterned conductive layer. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode over the piezoelectric layer, and a temperature compensation layer over the interdigital transducer electrode. The interdigital transducer electrode can include a bus bar and fingers extending from the bus bar. The fingers can each include an edge portion and a body portion. The patterned conductive layer can overlap the edge portions of the fingers. The patterned conductive layer can conductive portions that are spaced apart from each other. A portion of the temperature compensation layer can be positioned between the patterned conductive layer and the interdigital transducer electrode.
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