Composite substrate for surface acoustic wave device and manufacturing method thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12136907
APP PUB NO 20210359660A1
SERIAL NO

17308422

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film, a support substrate, and a first intervening layer between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTD6-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO 100-0004

International Classification(s)

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  • 2021 Application Filing Year
  • H03H Class
  • 1034 Applications Filed
  • 655 Patents Issued To-Date
  • 63.35 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Shoji Gunma, JP 180 1705
Tanno, Masayuki Gunma, JP 37 166

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges8934501 - 10050100150200250300350400450500550600650700750800850900950

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