Composite substrate for surface acoustic wave device and manufacturing method thereof
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Nov 5, 2024
Grant Date -
Nov 18, 2021
app pub date -
May 5, 2021
filing date -
May 5, 2021
priority date (Note) -
In Force
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Abstract
A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film, a support substrate, and a first intervening layer between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SHIN-ETSU CHEMICAL CO LTD | 6-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO 100-0004 |
International Classification(s)

- 2021 Application Filing Year
- H03H Class
- 1034 Applications Filed
- 655 Patents Issued To-Date
- 63.35 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Akiyama, Shoji | Gunma, JP | 180 | 1705 |
# of filed Patents : 180 Total Citations : 1705 | |||
Tanno, Masayuki | Gunma, JP | 37 | 166 |
# of filed Patents : 37 Total Citations : 166 |
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- 0 Citation Count
- H03H Class
- 0 % this patent is cited more than
- 1 Age
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3.5 Year Payment | $1600.00 | $800.00 | $400.00 | May 5, 2028 |
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