Material processing apparatus and operating method thereof
Number of patents in Portfolio can not be more than 2000
United States of America
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Nov 5, 2024
Grant Date -
Jan 27, 2022
app pub date -
Mar 16, 2021
filing date -
Mar 16, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A material processing apparatus includes a processing chamber having an internal space, an external pressure source, a vacuum generator, a temperature regulator and a controller. The external pressure source is connected to the processing chamber for positive pressure action on the internal space. The vacuum generator is connected to the processing chamber for negative pressure action on the internal space. The temperature regulator is arranged in the processing chamber to adjust the temperature in the internal space. The controller is configured to control the external pressure source to increase the pressure in the processing chamber from a normal pressure to a first predetermined pressure, and configured to control the vacuum generator to reduce the pressure in the processing chamber to a second predetermined pressure less than the normal pressure after the pressure rises to the first predetermined pressure. An operating method of a material processing apparatus is also provided.
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