Organometallic photoresists for DUV or EUV lithography

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12135503
APP PUB NO 20220317572A1
SERIAL NO

17220412

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Abstract

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Organometallic photoresists suitable for use in deep ultraviolet (DUV) or extreme ultraviolet (EUV) lithography are provided. The organometallic photoresists contain an organometallic molecule having least a metal element M selected from the group consisting of Bi, Sb, and mixtures thereof, and having an oxidation state of 3+, and at least one polymerizable group R. A method of forming a patterned materials feature on a substrate utilizing the organometallic photoresist compositions is also provided.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Meijer, Gerhard Ingmar Zurich, CH 41 673
Staar, Peter Willem Jan Zurich, CH 31 75
Weber, Valery Gattikon, CH 14 5

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