MEMS actuator system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12135437
APP PUB NO 20210088804A1
SERIAL NO

17025147

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Abstract

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A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.

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Patent Owner(s)

Patent OwnerAddress
MEMS DRIVE (NANJING) CO LTDNO 9-50 BUYUE ROAD QIAOLIN STREET PUKOU DISTRICT NANJING JIANGSU JIANGSU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Xiaolei South Pasadena, US 115 570
Ng, Matthew Rosemead, US 42 158
Wang, Guiqin Arcadia, US 72 539

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