Cleaning materials and processes for lithium processing equipment

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12134822
APP PUB NO 20220162747A1
SERIAL NO

17529463

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Abstract

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Exemplary methods of removing lithium-containing deposits may include heating a surface of a lithium-containing deposit. The surface may include oxygen or nitrogen, and the lithium-containing deposit may be disposed on a surface of a processing chamber. The methods may include contacting the surface of the lithium-containing deposit with a hydrogen-containing precursor. The contacting may hydrogenate the surface of the lithium-containing deposit. The methods may include contacting the lithium-containing deposit with a nitrogen-containing precursor to form volatile byproducts. The methods may include exhausting the volatile byproducts of the lithium-containing deposit from the processing chamber.

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Patent Owner(s)

Patent OwnerAddress
ELEVATED MATERIALS US LLC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bagul, Nilesh Chimanrao Bangalore, IN 14 359
Chakraborty, Tapash Thane, IN 19 61
Deepak, Nitin Thane, IN 17 26
Goradia, Prerna Sonthalia Mumbai, IN 34 1008
Herle, Subramanya P Mountain View, US 69 343
Sivaramakrishnan, Visweswaren Cupertino, US 114 5314
Upadhye, Bahubali S Bangalore, IN 10 15

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