Systems and methods for casting sputtering targets

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12134125
APP PUB NO 20230075617A1
SERIAL NO

17798950

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Abstract

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Methods for manufacturing rotary target materials that allow a material to be cast in a melting zone of a casting vessel while the vessel is rotated such that a melting zone is below a casting zone. The vessel is sealed and the pressure inside the vessel is reduced and the exterior of the vessel is heated. The melting zone of the vessel is heated to a temperature that melts the material and releases any trapped gasses which can be pumped out using the vacuum pump. Once the melting zone and molten material have reached a specified temperature, outgassed, and the casting zone has reached a temperature to maximize adhesion and reduce voids and defects, the vessel is rotated until the melting zone is directly above the casting zone to transfer the material from the melting zone to the casting zone.

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Patent Owner(s)

Patent OwnerAddress
JUNORA LTD16 POMPERLEAU STREET BIDDEFORD ME 04005

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carter, Paul Waterboro, US 78 1175
Ferrin, Larry Lebanon, US 1 0
Morse, Patrick Tucson, US 5 0
Norberg, Nancy South Portland, US 1 0
Plaisted, Dean Kennebunk, US 9 31

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