Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Oct 29, 2024
Grant Date -
Sep 1, 2022
app pub date -
May 12, 2022
filing date -
May 12, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Acoustic filters and methods of fabrication are disclosed. A filter device includes a substrate and a single-crystal piezoelectric plate, a back surface of the piezoelectric plate attached to a surface of the substrate. The filter device includes a plurality of acoustic resonators including one or more shunt resonators and one or more series resonators. Each of the plurality of acoustic resonators includes an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate, interleaved fingers of the IDT disposed on a respective diaphragm formed by a respective portion of the piezoelectric plate that spans a respective cavity in the substrate. A divided frequency setting layer is formed on at least some of the one or more shunt resonators but not on the one or more series resonators.
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International Classification(s)
- 2022 Application Filing Year
- H03H Class
- 1102 Applications Filed
- 415 Patents Issued To-Date
- 37.66 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- H03H Class
- 0 % this patent is cited more than
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