Micro device mass transfer tool
Number of patents in Portfolio can not be more than 2000
United States of America
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Oct 29, 2024
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N/A
app pub date -
Nov 4, 2020
filing date -
Nov 4, 2020
priority date (Note) -
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Abstract
A micro device transfer tool and methods of operation in which the micro device transfer tool includes an articulating transfer head assembly capable of six degrees of motion. A miniatured camera assembly may be secured near the point of contact for the articulating transfer head assembly to aid in system alignment. In an embodiment, an encoder system is included for alignment of a micro pick up array and target substrate using complementary concentric grating patterns. In an embodiment a miniaturized position sensor design is included for sensing position of various system components during alignment or pick and place processes.
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