Methods for depositing blocking layers on metal surfaces

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United States of America

PATENT NO 12131900
APP PUB NO 20220384176A1
SERIAL NO

17873793

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Abstract

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Methods of enhancing selective deposition are described. In some embodiments, a blocking layer is deposited on a metal surface before deposition of a dielectric. In some embodiments, a metal surface is functionalized to enhance or decrease its reactivity.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhuyan, Bhaskar Jyoti San Jose, US 98 526
Kalutarage, Lakmal C San Jose, US 31 723
Knisley, Thomas Joseph Livonia, US 26 1609
Saly, Mark Santa Clara, US 123 1499

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