Pellicle frame with stress relief trenches

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12130551
APP PUB NO 20230324787A1
SERIAL NO

18335232

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Importance

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Abstract

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A photomask assembly may be formed such that stress relief trenches are formed in a pellicle frame of the photomask assembly. The stress relief trenches may reduce or prevent damage to a pellicle that may otherwise result from deformation of the pellicle. The stress relief trenches may be formed in areas of the pellicle frame to allow the pellicle frame to deform with the pellicle, thereby reducing the amount damage to the pellicle caused by the pellicle frame.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hsin-Yu Hsinchu, TW 193 1239
Chung, Chiu-Hua Hsinchu, TW 22 51
Jhang, You-Cheng Changhua, TW 16 44
Lee, Kuo-Hao Hsinchu, TW 18 20
Lin, Sheng-Yuan Hsinchu, TW 45 508
Pan, Han-Zong Hsinchu, TW 20 48
Weng, Jui-Chun Taipei, TW 38 148

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