Method of manufacturing a template
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United States of America
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Oct 29, 2024
Grant Date -
Mar 30, 2023
app pub date -
Sep 27, 2021
filing date -
Sep 27, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A method of manufacturing a template including a mesa on a second side is disclosed. The method can include depositing a first coating on the second side, depositing a photocurable material over a top of the mesa, contacting the photocurable material with a second surface to cause the photocurable material to cover the top surface of the mesa and at least a portion of a side of the mesa, curing the photocurable material to form a cured film on the top surface and to form a cured extrusion on at least a portion of the side surface, the cured extrusion is thicker than the cured film, etching the top surface of the mesa to remove the first coating and the cured film from the top surface, and removing the cured extrusion to form the template with the first coating on the side surface.
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