Extreme ultraviolet mask with reduced wafer neighboring effect

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12130548
APP PUB NO 20230367194A1
SERIAL NO

18343493

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Importance

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Abstract

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A reticle is provided. The reticle includes a first reflective multilayer (ML) over a mask substrate and a capping layer over the first reflective ML. The reticle also includes a first absorption layer over the capping layer and a second reflective multilayer (ML) over the first absorption layer. The reticle further includes an etch stop layer over the second reflective ML and a third reflective multilayer (ML) over the etch stop layer. In addition, the reticle includes an absorption film pair over the third reflective ML.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chia-Jen Jhudong Township, Hsinchu County, TW 98 1413
Hsueh, Wen-Chang Taoyuan, TW 12 20
Lee, Hsin-Chang Zhubei, TW 203 1090
Lee, Huan-Ling Hsinchu County, TW 21 10

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