Vertical batch furnace assembly comprising a cooling gas supply
Number of patents in Portfolio can not be more than 2000
United States of America
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Oct 29, 2024
Grant Date -
Mar 9, 2023
app pub date -
Nov 14, 2022
filing date -
Nov 14, 2022
priority date (Note) -
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Abstract
A vertical batch furnace assembly, comprising a core tube, an outer casing, a cooling chamber bounded and enclosed by the outer casing and the core tube, and at least one cooling gas supply emanating in the cooling chamber. The core tube has an elongated circumferential wall extending in a longitudinal direction, and is configured to accommodate wafers for processing in the vertical batch furnace. The outer casing extends around the core tube and comprises a heating element for applying a thermal treatment to wafers accommodated in the core tube. The at least one cooling gas supply comprises at least one cooling gas supply opening which is arranged such that the cooling gas enters the cooling chamber with a flow direction which is substantially tangent to the circumferential wall.
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