Microelectronics package with vertically stacked MEMS device and controller device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12129168
APP PUB NO 20210188624A1
SERIAL NO

17102957

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Importance

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Abstract

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The present disclosure relates to a microelectronics package with a vertically stacked structure of a microelectromechanical systems (MEMS) device and a controller device. The MEMS device includes a MEMS component, a MEMS through-via, and a MEMS connecting layer configured to electrically connect the MEMS component with the MEMS through-via. The controller device includes a controlling component, a controller through-via, and a controller connecting layer configured to electrically connect the controlling component with the controller through-via. The controller through-via is in contact with the MEMS through-via, such that the controlling component in the controller device is configured to control the MEMS component in the MEMS device.

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Patent Owner(s)

Patent OwnerAddress
QORVO US INC7628 THORNDIKE ROAD GREENSBORO NC 27409

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Costa, Julio C Oak Ridge, US 101 7980
Renault, Mickael San Jose, US 22 199

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