Multi-zone pedestal heater without vias

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United States of America Patent

PATENT NO 12127310
SERIAL NO

17696486

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Importance

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Abstract

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A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.

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Patent Owner(s)

Patent OwnerAddress
WATLOW ELECTRIC MANUFACTURING COMPANY12001 LACKLAND ROAD ST LOUIS MO 63146

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ames, Ken San Jose, US 5 9
Breitlow, Stanton Hopkins Winona, US 18 315
English, Kurt Columbia, US 11 12
Margavio, Patrick Columbia, US 19 30
Nosrati, Mohammad Redwood City, US 28 161
Phillips, Brittany St. Louis, US 14 33
Ptasienski, Kevin O'Fallon, US 61 544
Smith, Kevin Columbia, US 228 4827

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