Reflective mask blank and reflective mask

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United States of America Patent

PATENT NO 12124164
APP PUB NO 20240241433A1
SERIAL NO

18621502

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Abstract

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A reflective mask blank includes a substrate, a multilayered reflection film configured to reflect EUV rays, a protection film configured to protect the multilayered reflection film, and an absorption film configured to absorb the EUV rays in this order. The protection film contains Rh as a main component. The multilayered reflection film includes an uppermost layer that is closest to the protection film in the multilayered reflection film and contains Si and N. In the uppermost layer, an element ratio (N/Si) of N to Si is greater than 0.00 and less than 1.50, and an element ratio (O/Si) of O to Si is 0.00 or greater and less than 0.44.

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Patent Owner(s)

Patent OwnerAddress
AGC INC5-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-8405

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Hanekawa, Hiroshi Tokyo, JP 24 82
Hanzawa, Chikako Fukushima, JP 2 0
Ikeda, Sadatatsu Fukushima, JP 6 13
Iwata, Yukihiro Fukushima, JP 21 65
Kato, Takuma Tokyo, JP 26 31
Oishi, Ryusuke Fukushima, JP 5 0
Tsukiyama, Keishi Tokyo, JP 5 1
Uno, Toshiyuki Fukushima, JP 32 319

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