Mask defect prevention

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12124163
APP PUB NO 20230367197A1
SERIAL NO

18359954

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Abstract

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A photolithographic mask assembly according to the present disclosure accompanies a photolithographic mask. The photolithographic mask includes a capping layer over a substrate and an absorber layer disposed over the capping layer. The absorber layer includes a first main feature area, a second main feature area, and a venting feature area disposed between the first main feature area and the second main feature area. The venting feature area includes a plurality of venting features.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Ching-Yueh Hsinchu, TW 14 15
Chen, Yu-Tung Hsinchu, TW 13 11
Hsu, Ting-Chang Hsinchu, TW 7 27
Hu, Wei-Chung Hsinchu, TW 11 11
Lin, Cheng-Ming Yunlin County, TW 100 187
Lu, Chi-Ta Yilan County, TW 23 34
Tu, Chih-Chiang Tauyen, TW 85 480

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