Physical quantity sensor, physical quantity sensor device, and method for manufacturing physical quantity sensor device
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United States of America Patent
Stats
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Oct 22, 2024
Grant Date -
Feb 2, 2023
app pub date -
Jul 26, 2022
filing date -
Jul 28, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A physical quantity sensor includes: a base portion; a first arm portion, a second arm portion, and a third arm portion that are coupled to the base portion and that are provided with fixing portions; a movable portion disposed between the first arm portion and the second arm portion and between the first arm portion and the third arm portion in a plan view; a constricted portion that is disposed between the base portion and the movable portion, and that couples the base portion and the movable portion; and a physical quantity detection element that is disposed across the constricted portion in the plan view and that is attached to the base portion and the movable portion. Thin portions are formed at least at two positions in at least one of the second arm portion and the third arm portion.
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