Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment

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United States of America Patent

PATENT NO 12123792
APP PUB NO 20230096612A1
SERIAL NO

17934214

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Abstract

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A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES25 RUE LEBLANC BATIMENT "LE PONANT D" PARIS 75015

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miani, Théo Grenoble, FR 2 0
Sansa, Perna Marc Grenoble, FR 12 3

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