Diaphragm, valve device, and method for manufacturing diaphragm

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United States of America Patent

PATENT NO 12123520
SERIAL NO

17510805

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Abstract

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A diaphragm includes: a metal thin plate; and a thin film layer formed over an entirety of a surface on one side of the thin plate.

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Patent Owner(s)

Patent OwnerAddress
FUJIKIN INCORPORATED3-2 ITACHIBORI 2-CHOME NISHI-KU OSAKA-SHI OSAKA 5500012 ?5500012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inada, Toshiyuki Osaka, JP 19 34
Kondo, Kenta Osaka, JP 38 38
Nakada, Tomoki Osaka, JP 4 0
Nakata, Tomohiro Osaka, JP 88 294
Watanabe, Kazunari Osaka, JP 55 399

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