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United States of America Patent

PATENT NO 12122685
SERIAL NO

18656350

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Abstract

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A method and a device for preparing MoF6 based on plasma activation of SF6. The method includes the following steps: S1, filling a discharge area of a plasma reactor with molybdenum powder; S2, introducing an inert gas and an SF6 gas into the discharge area of the plasma reactor, where the inert gas is ionized into plasma, and the SF6 gas is ionized into fluorine atoms and low-fluorine sulfides after being activated by the plasma; and S3, generating an MoF6 gas and sulfur elements through reaction of the fluorine atoms and the low-fluorine sulfides with the molybdenum powder.

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Patent Owner(s)

Patent OwnerAddress
HUBEI UNIVERSITY OF TECHNOLOGY430068 NO 28 NANLI ROAD HONGSHAN DISTRICT WUHAN CITY HUBEI PROVINCE WUHAN CITY HUBEI PROVINCE 430068
HANDAN PUXIN ELECTRIC POWER TECHNOLOGY CO LTDNO 111 LUCHAN STREET SOUTHWEST DISTRICT YONGNIAN DISTRICT INDUSTRIAL PARK HANDAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Guangke Handan, CN 2 0
Li, Yalong Wuhan, CN 11 15
Tian, Shuangshuang Wuhan, CN 4 0
Wan, Kun Wuhan, CN 9 11
Wu, Yunjian Wuhan, CN 2 0
Yang, Zhaodi Wuhan, CN 2 0
Zhang, Guoguang Wuhan, CN 15 18
Zhang, Guozhi Wuhan, CN 4 0
Zhang, Xiaoxing Wuhan, CN 51 188
Zhang, Yin Wuhan, CN 123 1267

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