Micro-oscillator, method of manufacturing micro-oscillator, and apparatus for processing micro-oscillator

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United States of America Patent

PATENT NO 12121996
APP PUB NO 20230294210A1
SERIAL NO

18183307

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Abstract

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A method of manufacturing a micro-oscillator includes: preparing a substrate having a flat portion and a curved surface portion formed in a three-dimensional curved shape protruding from one surface of the flat portion, the curved surface portion being surrounded by the flat portion; and irradiating an outer surface of the curved surface portion with a laser beam to separate the curved surface portion from the flat portion.

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Patent Owner(s)

Patent OwnerAddress
TOYOTA JIDOSHA KABUSHIKI KAISHA1 TOYOTA-CHO TOYOTA-SHI AICHI-KEN 471-8571
DENSO CORPORATION1-1 SHOWA-CHO KARIYA-CITY AICHI-PREF 448-8661
MIRISE TECHNOLOGIES CORPORATION500-1 MINAMIYAMA KOMENOKI-CHO NISSHIN-SHI AICHI-KEN 470-0111

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichihashi, Yuki Kariya, JP 1 0
Inagaki, Yuuki Nisshin, JP 12 13
Ito, Yuji Kariya, JP 305 3334

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