Method of manufacturing holding device, method of manufacturing structure for holding device, and holding device
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United States of America Patent
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Oct 15, 2024
Grant Date -
N/A
app pub date -
Mar 27, 2020
filing date -
Apr 16, 2019
priority date (Note) -
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Abstract
A holding device that holds an object on a first surface of a first portion of a plate-shaped member includes a heater pattern formed on a ceramic green sheet and a cover layer covering the heater pattern. A second portion of the plate-shaped member and a heater electrode are manufactured by firing a layered body constituted by a plurality of ceramic green sheets. A second joining portion joins the second portion and a base member. A temperature distribution of a second surface of the second portion is measured while cooling with a cooling mechanism of the base member and supplying power to the heater electrode. Based on a result of the measurement, an electrical resistance of the heater electrode is adjusted by removing a portion of the heater electrode together with the cover layer. A first joining portion joins the second portion and the first portion of the plate-shaped member.
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