Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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United States of America Patent
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Oct 15, 2024
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N/A
app pub date -
Jan 11, 2022
filing date -
Jul 31, 2019
priority date (Note) -
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Abstract
A particle beam system and, such as a multi-beam particle microscope, can have a current intensity of individual particle beams that is flexibly set over large value ranges without structural modifications. The particle beam system can include a condenser lens system, a pre-multi-lens array with a specific pre-counter electrode and a pre-multi-aperture plate, and a multi-lens array. The system can includes a controller to supply adjustable excitations to the condenser lens system and the pre-counter electrode so that the charged particles are incident on the pre-multi-aperture plate in telecentric manner.
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