Thermo-mechanical actuator

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United States of America Patent

PATENT NO 12117739
APP PUB NO 20220236651A1
SERIAL NO

17629202

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Abstract

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Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bos, Koen Martin Willem Jan Eindhoven, NL 3 0
Jansen, Bas Den Bosch, NL 10 3
Vermeulen, Johannes Petrus Martinus Bernardus Leende, NL 81 430

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