MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform

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United States of America Patent

PATENT NO 12117608
SERIAL NO

17369145

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Abstract

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A MEMS micromirror device is formed in a package including a containment body and a lid transparent to a light radiation. The package forms a cavity housing a tiltable platform having a reflecting surface. A metastructure is formed on the lid and/or on the reflecting surface and includes a plurality of diffractive optical elements.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LITALY AGRA BRIANZA AGRATE BRIANZA VARESE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boni, Nicolo' BG, IT 32 18
Carminati, Roberto Piancogno, IT 67 148
Duqi, Enri Milan, IT 56 120
Merli, Massimiliano Pavia, IT 28 41

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