MEMs phased-array for LiDAR applications

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United States of America Patent

PATENT NO 12117606
APP PUB NO 20210072531A1
SERIAL NO

17001477

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Abstract

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An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.

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Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDKYOTO JAPAN
SILICON LIGHT MACHINES CORPORATION820 KIFER ROAD SUNNYVALE CA 94086

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashida, Yuki Kyoto, JP 4 3
Eng, Lars Los Altos, US 20 37
Hamann, Stephen Mountain View, US 9 3
Hunter, James Campbell, US 52 674
Payne, Alexander Ben Lommond, US 37 225
Solgaard, Olav Stanford, US 94 2978

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