Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement
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United States of America Patent
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Oct 15, 2024
Grant Date -
Feb 8, 2024
app pub date -
Sep 27, 2023
filing date -
Mar 30, 2021
priority date (Note) -
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Abstract
An atomic layer deposition reactor and a method for operating a reactor. The reactor includes a vacuum chamber having a loading wall provided with a loading opening, and a reactor door assembly having a reactor door. The reactor door assembly is arranged to move the reactor door between a first door position in which the reactor door is against the loading wall and arranged to close the loading opening, and a second door position in which the reactor door is spaced apart from and opposite the loading wall. The reactor door assembly is further arranged to move the reactor door between the second door position, and a third door position in which the reactor door is aside from the loading opening.
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