Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12116520
APP PUB NO 20210309914A1
SERIAL NO

17346641

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An etching composition contains phosphoric acid, phosphoric anhydride, a compound represented by the following Formula 1, and a silane compound comprising at least one silicon (Si) atom, excluding the compound represented by Formula 1:

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SK INNOVATION CO LTDSEOUL 110-110
SK INC26 JONG-RO JONGNO-GU SEOUL 03188

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jo, Jin Kyung Yeongju-si, KR 9 9
Kim, Cheol Woo Daejeon, KR 47 310
Kim, Young Bom Yeongju-si, KR 9 9
Kwak, Jae Hoon Yeongju-si, KR 23 60
Lee, Jong Ho Yeongju-si, KR 415 3173
Seon, Min Kyung Daejeon, KR 11 1
Shim, Yu Na Daejeon, KR 34 24

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 15, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 15, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 15, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00