Holding device and method of manufacturing holding device
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United States of America Patent
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Oct 8, 2024
Grant Date -
Dec 24, 2020
app pub date -
Nov 13, 2019
filing date -
Nov 19, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.
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