Mass flow controller and flow control method therefor
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United States of America Patent
Stats
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Oct 8, 2024
Grant Date -
Jul 11, 2024
app pub date -
May 27, 2022
filing date -
May 28, 2021
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.
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Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Apr 8, 2028 |
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