Coater with automatic cleaning function and coater automatic cleaning method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12111575
APP PUB NO 20210072645A1
SERIAL NO

17080396

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A coater with automatic cleaning function and a coater automatic cleaning method. The coater (100,200,300,400,500,600,700,800) includes a coater chamber (101,201,301,401,501,601,701,801) capable of being filled up with cleaning solution, a substrate chuck (102,202,302,402,502,602,702,802) holding and positioning a substrate (103,203,303,403,503,603,703,803), and at least one shroud (108,208,308,408,508) capable of moving up for preventing photoresist from splashing out of the coater chamber (101,201,301,401,501,601,701,801), or moving down and immersing into the cleaning solution for cleaning. The coater (100,200,300,400,500,600,700,800) automatic cleaning method includes the following steps: turning off a liquid outlet valve (118,218,318,418A,418B,518,532,618,718,818) of the coater (100,200,300,400,500,600,700,800); filling up a coater chamber (101,201,301,401,501,601,701,801) with cleaning solution; after photoresist in the coater chamber (101,201,301,401,501,601,701,801) being dissolved into the cleaning solution, turning on the liquid outlet valve (118,218,318,418A,418B,518,532,618,718,818) and draining the cleaning solution out of the coater chamber (101,201,301,401,501,601,701,801).

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ACM RESEARCH (SHANGHAI) INCNO 1690 CAI LUN ROAD BUILDING 4 ZHANGJIANG HIGH-TECH PARK PUDONG DISTRICT SHANGHAI 201203

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fufa Shanghai, CN 30 893
Chen, Fuping Shanghai, CN 45 43
Nuch, Voha Shanghai, CN 13 115
Wang, Hui Shanghai, CN 1115 8921
Wang, Jian Guangzhou, CN 1906 17240
Wang, Wenjun Shanghai, CN 67 121
Yang, Hongchao Shanghai, CN 24 2
Yang, Shu Shanghai, CN 86 1359
Zhang, Xiaoyan Shanghai, CN 147 1153

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 8, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 8, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 8, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00