Mask reticle

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12111568
SERIAL NO

17449809

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A mask includes a first boundary area and a plurality of exposure pattern areas, the first boundary area including a region surrounding the plurality of exposure pattern areas; in the first boundary area is disposed a plurality of first overlay mark units, each of which includes a plurality of overlay marks; the plurality of overlay marks are sequentially arranged along extension directions of adjacent transversal or longitudinal first boundary lines; a plurality of first overlay mark units are symmetric in pairs with a central line of the mask as a symmetric axis, and two symmetric first overlay mark units form an overlay mark set; arrangement directions of two overlay marks in the first overlay mark units in the same overlay mark set are parallel to and displaced with respect to each other.

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Patent Owner(s)

Patent OwnerAddress
CHANGXIN MEMORY TECHNOLOGIES INC230601 NO 388 XINGYE AVENUE AIRPORT INDUSTRIAL PARK HEFEI ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE ANHUI PROVINCE HEFEI CITY ANHUI PROVINCE 230601

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Xia, Yunsheng Hefei, CN 3 0

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