MEMS-based rotation sensor for seismic applications and sensor units having same
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United States of America Patent
Stats
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Oct 8, 2024
Grant Date -
Mar 9, 2023
app pub date -
Oct 27, 2022
filing date -
Dec 19, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
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International Classification(s)
- 2022 Application Filing Year
- G01P Class
- 541 Applications Filed
- 241 Patents Issued To-Date
- 44.55 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- G01P Class
- 0 % this patent is cited more than
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