Vibration isolation table for semiconductor equipment and vibration isolation table system including the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 8, 2024
Grant Date -
Mar 16, 2023
app pub date -
Apr 12, 2022
filing date -
Sep 14, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully