Adjustable fluid inlet assembly for a substrate processing apparatus and method

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United States of America Patent

PATENT NO 12110588
APP PUB NO 20230090809A1
SERIAL NO

17991611

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Abstract

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A fluid inlet assembly for a substrate processing apparatus includes a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel, a resilient element around the fluid inlet pipe outside the sealed pressure vessel coupling the fluid inlet pipe to the wall, and first and second end parts, the resilient element being coupled therebetween.

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Patent Owner(s)

Patent OwnerAddress
PICOSUN OYTIETOTIE 3 ESPOO 02150

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kilpi, Väinö Masala, FI 12 5
Malinen, Timo Espoo, FI 18 1296
Pudas, Marko Masala, FI 28 20

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