Substrate treatment device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 8, 2024
Grant Date -
Oct 21, 2021
app pub date -
Apr 14, 2021
filing date -
Apr 15, 2020
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
According to one embodiment, a substrate treatment device includes a placement stand configured to rotate the substrate, a cooling part configured to supply a cooling gas into a space between the placement stand and the substrate, a first liquid supplier configured to supply a first liquid on a surface of the substrate, a second liquid supplier configured to supply a second liquid on the surface, and a controller controlling rotation of the substrate, supply of the cooling gas, the first and second liquids. The controller performs a preliminary process of supplying the second liquid on the surface, and supplying the cooling gas into the space, a liquid film forming process by supplying the first liquid toward the surface after the preliminary process, a supercooling process of the liquid film on the surface, and a freezing process of at least a part of the liquid film on the surface.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2021 Application Filing Year
- H01L Class
- 28775 Applications Filed
- 15216 Patents Issued To-Date
- 52.88 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Apr 8, 2028 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Apr 8, 2032 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 8, 2036 |
