Ceramic heater with shaft

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United States of America

PATENT NO 12108499
SERIAL NO

17452805

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Abstract

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A ceramic heater with a shaft includes: a ceramic plate in which a resistance heating element is embedded; a hollow ceramic shaft having an upper end bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; and a shaft heater embedded in a side wall near an upper end of the ceramic shaft.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDJAPAN'S AICHI AICHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aikawa, Kenichiro Handa, JP 16 87
Kuno, Tatsuya Nagoya, JP 64 80
Takebayashi, Hiroshi Handa, JP 103 140

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