Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12107129
APP PUB NO 20230253461A1
SERIAL NO

18302378

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10−5 Å or less is observed.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MITSUBISHI CHEMICAL CORPORATION1-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-8251

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujisawa, Hideo Ushiku, JP 33 139
Fujito, Kenji Ushiku, JP 22 280
Ikeda, Hirotaka Ushiku, JP 17 55
Kamada, Kazunori Ushiku, JP 23 118
Kubo, Shuichi Ushiku, JP 27 347
Mikawa, Yutaka Ushiku, JP 36 168
Mochizuki, Tae Ushiku, JP 16 40
Nagao, Satoru Ushiku, JP 31 336
Tsukada, Yusuke Ushiku, JP 20 89

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 1, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 1, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 1, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00