Method for scanning a sample by means of X-ray optics and an apparatus for scanning a sample

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United States of America Patent

PATENT NO 12106867
APP PUB NO 20170162287A1
SERIAL NO

15325958

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Abstract

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A method for scanning a sample by means of X-ray optics for irradiating the sample with X-rays, comprises the following steps:

    (a) displacing a measuring point, defined by an optical exit point of the X-ray optics, in the sample in a first scanning direction by means of swiveling the X-ray optics about a first swivel axis;(b) detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction;(c) combining measured values correlating with the detected radiation to form an overall scan.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO GMBHSCHWARZSCHILDSTRASSE 12 BERLIN 12489

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Waldschläger, Ulrich Berlin, DE 3 6

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