Techniques for controlling precursors in chemical deposition processes

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12104253
APP PUB NO 20230323540A1
SERIAL NO

18208084

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An apparatus for controlling precursor flow. The apparatus may include a processor; and a memory unit coupled to the processor, including a flux control routine. The flux control routine may be operative on the processor to monitor the precursor flow and may include a flux calculation processor to determine a precursor flux value based upon a change in detected signal intensity received from a cell of a gas delivery system to deliver a precursor.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babayan, Elaina Gloucester, US 3 5
Bakke, Jonathan Gloucester, US 13 37
Venugopal, Vijay Gloucester, US 8 7
White, Sarah Gloucester, US 10 284

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 1, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 1, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 1, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00