Flotation conveyance apparatus and laser processing apparatus
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United States of America Patent
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Oct 1, 2024
Grant Date -
Aug 19, 2021
app pub date -
Jan 14, 2021
filing date -
Feb 13, 2020
priority date (Note) -
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Abstract
A flotation conveyance apparatus according to an embodiment conveys a substrate while floating the substrate by ejecting a gas to a lower surface of the substrate. The flotation conveyance apparatus includes an upper plate disposed on the substrate side including a plurality of ejecting ports for ejecting the gas and a lower plate disposed under the upper plate. Flow-paths for supplying the gas to the plurality of ejecting ports are provided on at least one of the upper plate and the lower plate.
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