Bulk acoustic wave device with raised frame structure

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United States of America

PATENT NO 12101077
SERIAL NO

17472199

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Abstract

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Aspects of this disclosure relate to a bulk acoustic wave device with a multi-layer raised frame. The bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer positioned between the first electrode and the second electrode, and a multi-layer raised frame structure configured to cause lateral energy leakage from a main acoustically active region of the bulk acoustic wave device to be reduced. The multi-layer raised frame structure includes a first raised frame layer embedded in the piezoelectric layer and a second raised frame layer. The first raised frame layer has a lower acoustic impedance than the piezoelectric layer.

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Patent Owner(s)

  • SKYWORKS GLOBAL PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abbott, Benjamin Paul Irvine, US 43 51
Liu, Jiansong Irvine, US 56 241
Shin, Kwang Jae Yongin, KR 77 256
Shirakawa, Alexandre Augusto Cardiff by the Sea, US 41 259
Zhang, Benfeng Moriguchi, JP 11 32

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