Method for determining a cleanliness of a cleaning member

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United States of America

PATENT NO 12101073
SERIAL NO

17323700

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Abstract

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In a method for determining cleanliness of a cleaning member that contacts a substrate and with which scrub cleaning is performed, the method includes a first step of self-cleaning a cleaning member by releasing contaminants from the cleaning member into a cleaning liquid, and a second step of bringing a self-cleaning discharged liquid into contact with an electrode of a crystal oscillator, attaching the contaminants contained in the discharged liquid onto the electrode of the crystal oscillator, then measuring a frequency response of the crystal oscillator in which the contaminants are attached onto the electrode, and determining cleanliness of the cleaning member based on the measured frequency response.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510 ?1448510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Masahito Tokyo, JP 17 953
Kon, Toshiya Tokyo, JP 1 0
Nakamura, Yumiko Tokyo, JP 28 74
Shima, Shohei Tokyo, JP 13 175
Takatoh, Chikako Tokyo, JP 9 8
Uno, Megumi Tokyo, JP 5 2

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