Z magnetic field sensors with planar calibration coils
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United States of America Patent
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Sep 24, 2024
Grant Date -
Jun 22, 2023
app pub date -
Nov 17, 2022
filing date -
Nov 25, 2021
priority date (Note) -
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Abstract
The innovative concept described herein relates to a sensor chip having at least two magnetic field sensors that are arranged adjacently to one another on the sensor chip and measure perpendicularly to the chip plane, wherein at least one of the magnetic field sensors has a planar coil arranged on it that is configured to generate a magnetic field directed perpendicularly to the chip plane. A controller is able to operate the magnetic field sensors in a calibration mode, in which the planar coil generates the magnetic field. For the purpose of calibrating the magnetic field sensors, a differential measurement may be taken that involves the response signal from one magnetic field sensor being subtracted from the response signal from the other magnetic field sensor.
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