Imprint apparatus and method for manufacturing article
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United States of America Patent
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Sep 24, 2024
Grant Date -
Jul 13, 2023
app pub date -
Feb 24, 2023
filing date -
May 31, 2018
priority date (Note) -
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Abstract
An imprint apparatus that forms a pattern of an imprint material on a substrate with use of a mold includes a mold holding unit configured to hold the mold, a suction unit provided at the mold holding unit and configured to suction a gas in a space in which the mold and the substrate face each other, a detector configured to detect particles included in the gas suctioned by the suction unit, and a control unit configured to perform error processing depending on a result of detection performed by the detector.
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